1. Background Overview
Carbonyl fluoride (COF₂), as a new-generation high-efficiency fluorinating agent and a critical gas in the semiconductor industry, plays an irreplaceable role in high-end manufacturing and organic synthesis due to its active chemical properties and unique physical characteristics. Its core value lies in the efficient introduction of fluorine atoms and carbonyl functional groups to construct high-performance fluorinated material systems.
However, the synthesis of carbonyl fluoride is fraught with challenges. The extreme reaction conditions—high temperature, high pressure, and strong corrosiveness—make the synthesis process a precarious endeavor. A slight misstep can trigger side reactions, leading to insufficient product purity and a sharp drop in yield. Furthermore, within a multi-component, complex reaction system, the raw material conversion rate and product concentration are subject to rapid fluctuations.
2. Process Overview
The process for synthesizing carbonyl fluoride from hexafluoropropylene (HFP) is as follows:
Carbonyl Fluoride Oligomer Thermal Decomposition Process Flow:
Step a): Oxygen oxidizes HFP to obtain a mixture containing HFPO (hexafluoropropylene oxide) and carbonyl fluoride oligomers.
Oligomer general formula: CF₃O(CF₂O)ₙ-R (where R = -COF, -OCOF, or -CF₂COF).
Step b): In the presence of HFPO, the oligomers are thermally decomposed (without a catalyst).
Temperature: 60–200°C (preferably 80–150°C)
Pressure: 0.01–1.00 MPa
The products are carbonyl fluoride and HFPO.
Pain Points of Offline Detection:
1) Delayed Results: On-site sampling followed by laboratory analysis typically takes hours.
2) High Cost: Fluorine-containing gases damage chromatography columns, necessitating regular replacement.
3) Hazardous Sampling: Carbonyl fluoride is highly toxic, making the sampling process dangerous.
4) Presence of Large Amounts of O₂ in the Process: In the event of process anomalies, significant quantities of H₂ can be generated, posing an explosion risk.
3. Monitoring Requirements
Given the characteristics of various carbonyl fluoride synthesis processes, the key monitoring requirements are as follows:
Qualitative and quantitative analysis of gases such as O₂, CO₂, CF₄, COF₂, and C₂H₃FO in each stage of the COF₂ synthesis reaction.
Detection of four-carbon fluorinated gases.
Detection of heptafluoropropane gas.
4. Solution
To address the monitoring requirements for highly corrosive gases, we recommend the combined solution of the "RS2610PAT COF₂ Gas Analyzer + Corrosion-Resistant Pretreatment System".
JINSP RS2610PAT COF₂ Online Gas Analyzer is based on laser Raman spectroscopy and enables simultaneous online quantitative analysis of multiple gas components, including O₂, CO₂, CF₄, COF₂, and C₂H₃FO.
In the fluorine chemical industry, the RS2610PAT has been deployed for online analysis of feed gas and tail gas in COF₂ synthesis processes. The system offers the following advantages:
Online Analysis: No sampling required; the pipeline gas is continuously fed into the device for measurement, with no interference to the original system.
Second-Level Response: A single measurement is completed within seconds, with the software displaying concentrations and issuing alarms intuitively.
Broad Applicability: The sample gas temperature can be as low as –50°C, and the system is corrosion-resistant.
High Sensitivity: The detection limit is as low as the ppm level, with a measurement range up to 100%.
Multi-Component: Simultaneous detection of multiple gas component concentrations.
Because the RS2610PAT COF₂ gas analyzer offers rapid analysis—completing one data acquisition and analysis cycle within 5 seconds—it can be paired with a multi-channel gas pretreatment system. The pretreatment system enables automatic switching between multiple channels and multiple sampling points, allowing a single analyzer to serve multiple monitoring points, thereby reducing the overall investment cost of online analytical equipment.
5. Application Case
An on-site application in Hubei Province, China
Post time: Jul-28-2026