RS2610PAT-PF₅ Online Analyzer
On-line analysis: Pipeline gas is fed directly into the instrument for testing without interfering with the original process system.
Second-level response: A single measurement is completed within several seconds; concentrations are displayed directly on software together with alarm functions.
Excellent compatibility: Sample gas temperature can go as low as −50 °C; resistant to corrosion by HF and HCl.
High detection sensitivity: Detection limit down to ppm level; measuring range extends up to 100 %.
Multi-component capability: Simultaneous concentration measurement of multiple gas components.
1. Monitor concentrations of PF₅ and HCl in feed gas
2. Alarm for impurity gases in feed gas: Cl₂, PF₃, PCl₃, POF
3. Measure PF₅, HCl and HF concentrations in synthesis-reactor tail gas
4. Trigger alarm for excessive PF₅ in synthesis-reactor tail gas
|
Item |
Parameter |
|
Working Principle |
Raman scattering spectroscopy |
|
Gas-path Connector |
Standard ferrule fittings;
options: 3 mm, 6 mm, 1/8”, 1/4” |
|
Sample Gas Pressure |
< 1.0 MPa |
|
Sample Gas Temperature |
-50 ~ 40 °C |
|
Warm-up Time |
< 10 min |
|
Power Supply |
100 ~ 240 VAC, 50 ~ 60 Hz |
|
Ambient Operating Temperature |
-20 °C ~ 50 °C |
|
Ambient Humidity |
0-90 % RH |
|
Main Unit Dimension |
800 mm (L) × 900 mm (W) × 1300 mm (H) |
|
Cabinet Explosion-proof Rating |
ExdbebibmbpxbIICT4Gb / ExtbibmbIIICT135℃Db |
|
Main Unit Weight |
250 kg |
|
Communication |
RS485, RJ45 Ethernet port;
ModBus protocol available |
